Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Figure 2

(a) The double differential cross sections (in the units of 10⁻²⁰cm²/eV-sr) as a function of angle 𝜃 at (𝜀=10eV and 𝐸=100eV) corresponding to the production of various cations from electron impact ionization of SiH₄. (b) Same as (a) but at (𝜀=20eV and 𝐸=100eV). (c) Same as (a) but at (𝜀 = 10 eV and 𝐸=200eV). (d) Same as (a) but at (𝜀=20eV and 𝐸=200eV).

(a)

(b)

(c)

(d)