Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Figure 5

Partial ionization cross sections (in the units of 10⁻¹⁶cm²) for electron impact ionization of SiH₄ (designated with solid lines) in comparison with the experimental data designated by ×—Chatham et al. [8], —Krishnakumar and Srivastava [9], and —Basner et al. [10].

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