Research Article
Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane
Table 1
Table for the partial ionization cross sections for
by electron impact.
| (eV) | | | | | | | | Total |
| 20 | 0.71 | 1.00 | 0.14 | 0.17 | | | 2.02 | 30 | 1.39 | 1.81 | 0.43 | 0.34 | 0.01 | 0.04 | 4.02 | 40 | 1.63 | 2.10 | 0.56 | 0.45 | 0.02 | 0.11 | 4.87 | 50 | 1.71 | 2.18 | 0.60 | 0.49 | 0.02 | 0.15 | 5.15 | 60 | 1.70 | 2.16 | 0.60 | 0.50 | 0.03 | 0.16 | 5.16 | 70 | 1.66 | 2.11 | 0.59 | 0.50 | 0.03 | 0.17 | 5.05 | 80 | 1.61 | 2.03 | 0.57 | 0.48 | 0.03 | 0.17 | 4.89 | 90 | 1.54 | 1.95 | 0.54 | 0.47 | 0.03 | 0.17 | 4.70 | 100 | 1.48 | 1.87 | 0.52 | 0.45 | 0.03 | 0.17 | 4.51 | 125 | 1.34 | 1.69 | 0.46 | 0.41 | 0.02 | 0.16 | 4.07 | 150 | 1.22 | 1.53 | 0.41 | 0.37 | 0.02 | 0.14 | 3.69 | 200 | 1.03 | 1.29 | 0.34 | 0.31 | 0.02 | 0.12 | 3.11 | 250 | 0.89 | 1.12 | 0.29 | 0.26 | 0.02 | 0.11 | 2.69 | 300 | 0.79 | 0.99 | 0.26 | 0.23 | 0.01 | 0.09 | 2.37 | 400 | 0.64 | 0.81 | 0.21 | 0.19 | 0.01 | 0.08 | 1.93 | 500 | 0.55 | 0.68 | 0.17 | 0.16 | 0.01 | 0.06 | 1.63 | 600 | 0.48 | 0.60 | 0.15 | 0.14 | 0.01 | 0.06 | 1.42 | 700 | 0.42 | 0.53 | 0.13 | 0.12 | 0.01 | 0.05 | 1.26 | 800 | 0.38 | 0.48 | 0.12 | 0.11 | 0.01 | 0.04 | 1.14 | 900 | 0.35 | 0.44 | 0.11 | 0.10 | 0.01 | 0.04 | 1.03 |
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