Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Table 2

Table for the ionization rate coefficients (in the units of 10⁻²⁰cm³/s) corresponding to the formation of cations in electron dissociative ionization of SiH₄.

𝐸 (eV)	SiH3^+	SiH2^+	SiH^+	Si^+	H2^+	H^+	Total
20	6.22	8.70	0.81	1.15			16.87
30	43.42	56.69	11.36	9.48	0.11	0.50	121.56
40	111.66	143.36	34.35	28.42	0.77	4.45	323.01
50	204.56	260.65	66.52	55.54	2.00	12.21	601.47
55	257.82	327.77	84.98	71.46	2.79	17.27	762.08
60	314.43	399.05	104.55	88.53	3.67	22.97	933.21
70	434.79	550.47	145.91	125.09	5.68	35.81	1297.75
80	560.64	708.68	188.81	163.44	7.88	49.92	1679.38
90	688.18	868.92	231.94	202.30	10.19	64.66	2066.18
100	814.63	1027.73	274.36	240.76	12.52	79.58	2449.58
125	1112.68	1401.83	373.04	330.92	18.15	115.55	3352.17
150	1369.77	1724.34	456.55	407.86	23.10	147.20	4128.82
200	1732.03	2178.41	570.58	514.06	30.22	192.61	5217.90
250	1899.27	2387.60	619.23	560.61	33.63	214.40	5714.74
300	1911.95	2402.83	617.83	561.09	34.09	217.37	5745.16
400	1659.73	2085.17	528.62	481.86	29.72	189.53	4974.64
500	1270.81	1596.30	400.20	365.58	22.74	145.03	3800.66
600	900.73	1131.32	281.06	257.09	16.08	102.55	2688.84
700	605.90	760.96	187.62	171.78	10.79	68.77	1805.81
800	392.47	492.89	120.73	110.62	6.96	44.41	1168.08
900	247.07	310.28	75.57	69.27	4.37	27.87	734.43