About this Journal Submit a Manuscript Table of Contents
Advances in Physical Chemistry
Volume 2012 (2012), Article ID 205380, 6 pages
http://dx.doi.org/10.1155/2012/205380
Research Article

Characterization of the Chemical Kinetics in an O2/HMDSO RF Plasma for Material Processing

Dipartimento di Fisica Occhialini, Università degli Studi di Milano-Bicocca, Piazza della Scienza 3, 20126 Milano, Italy

Received 10 September 2012; Revised 26 October 2012; Accepted 27 October 2012

Academic Editor: Hiroshi Onishi

Copyright © 2012 Ruggero Barni et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. H. Biederman, Plasma Polymer Films, Imperial College Press, London UK, 2004.
  2. P. Esena, S. Zanini, and C. Riccardi, “Plasma processing for surface optical modifications of PET films,” Vacuum, vol. 82, no. 2, pp. 232–235, 2007. View at Publisher · View at Google Scholar · View at Scopus
  3. R. Lamendola and R. D'Agostino, “Process control of organosilicon plasmas for barrier film preparations,” Pure and Applied Chemistry, vol. 70, no. 6, pp. 1203–1208, 1998. View at Scopus
  4. D. S. Wavhal, J. Zhang, M. L. Steen, and E. R. Fisher, “Investigation of gas phase species and deposition of SiO2 films from HMDSO/O2 plasmas,” Plasma Processes and Polymers, vol. 3, no. 3, pp. 276–287, 2006. View at Publisher · View at Google Scholar · View at Scopus
  5. M. Creatore, Y. Barrell, J. Benedikt, and M. C. M. Van De Sanden, “On the hexamethyldisiloxane dissociation paths in a remote Ar-fed expanding thermal plasma,” Plasma Sources Science and Technology, vol. 15, no. 3, pp. 421–431, 2006. View at Publisher · View at Google Scholar · View at Scopus
  6. D. Magni, C. Deschenaux, C. Hollenstein, A. Creatore, and P. Fayet, “Oxygen diluted hexamethyldisiloxane plasmas investigated by means of in situ infrared absorption spectroscopy and mass spectrometry,” Journal of Physics D, vol. 34, no. 1, pp. 87–94, 2001. View at Publisher · View at Google Scholar · View at Scopus
  7. M. R. Alexander, F. R. Jones, and R. D. Short, “Mass spectral investigation of the radio-frequency plasma deposition of hexamethyldisiloxane,” Journal of Physical Chemistry B, vol. 101, no. 18, pp. 3614–3619, 1997. View at Scopus
  8. M. Weiler, K. Lang, E. Li, and J. Robertson, “Deposition of tetrahedral hydrogenated amorphous carbon using a novel electron cyclotron wave resonance reactor,” Applied Physics Letters, vol. 72, no. 11, pp. 1314–1316, 1998. View at Publisher · View at Google Scholar · View at Scopus
  9. R. Barni, S. Zanini, and C. Riccardi, “Diagnostics of reactive RF plasmas,” Vacuum, vol. 82, no. 2, pp. 217–219, 2007. View at Publisher · View at Google Scholar · View at Scopus
  10. R. W. B. Pearse and A. G. Gaydon, The Identification of Molecular Spectra, John Wiley & Sons, New York, NY, USA, 1976.
  11. A. Schwabedissen, E. C. Benck, and J. R. Roberts, “Langmuir probe measurements in an inductively coupled plasma source,” Physical Review E, vol. 55, no. 3, pp. 3450–3459, 1997. View at Scopus
  12. C. Riccardi, R. Barni, and M. Fontanesi, “Experimental study and simulations of electronegative discharges at low pressure,” Journal of Applied Physics, vol. 90, no. 8, pp. 3735–3742, 2001. View at Publisher · View at Google Scholar · View at Scopus
  13. F. F. Chen, Introduction to Plasma Physics, Plenum, New York, NY, USA, 1984.
  14. J. M. Smith, Introduction to Chemical Engineering Thermodynamics, McGraw-Hill, New York, NY, USA, 1987.
  15. C. Riccardi, R. Barni, F. De Colle, and M. Fontanesi, “Modeling and diagnostic of an SF6 RF plasma at low pressure,” IEEE Transactions on Plasma Science, vol. 28, no. 1, pp. 278–287, 2000. View at Publisher · View at Google Scholar · View at Scopus
  16. S. Zanini, C. Riccardi, M. Orlandi et al., “Surface properties of HMDSO plasma treated PET,” Surface and Coatings Technology, vol. 200, no. 1–4, pp. 953–957, 2005. View at Publisher · View at Google Scholar · View at Scopus
  17. S. Zanini, C. Riccardi, M. Orlandi, and E. Grimoldi, “Characterisation of SiOxCyHz thin films deposited by low-temperature PECVD,” Vacuum, vol. 82, no. 2, pp. 290–293, 2007. View at Publisher · View at Google Scholar · View at Scopus
  18. R. A. Siliprandi, S. Zanini, E. Grimoldi, F. S. Fumagalli, R. Barni, and C. Riccardi, “Atmospheric pressure plasma discharge for polysiloxane thin films deposition and comparison with low pressure process,” Plasma Chemistry and Plasma Processing, vol. 31, no. 2, pp. 353–372, 2011. View at Publisher · View at Google Scholar · View at Scopus
  19. A. Sonnenfeld, A. Bieder, and P. R. von Rohr, “Influence of the gas phase on the water vapor barrier properties of SiOx films deposited from RF and dual-mode plasmas,” Plasma Processes and Polymers, vol. 3, no. 8, pp. 606–617, 2006. View at Publisher · View at Google Scholar · View at Scopus