A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter
Figure 10
The power circuit and the control block diagram of a 25 kHz, 25 kW induction heating power supply using L-LC RI for MOVPE system. #The process controller, shown for the completeness, is not used in the laboratory testing of the system.