Research Article
A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter
Table 1
Component values and device part numbers used in the system.
| | Component | Value/Part number |
| | 2.2 mH | | 3 mF | | 300 μH | | 30 μF | | 150 μF | | 2.2 | | 5 μH | | 0.03 μF | | 0.33 μF | | 13.5 μH | | 15 μF | | - | VUO 82 | | - | SKM100GAR123D | | - and - | SKM100GB123D, two modules | | DSEI 31 × 100 |
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