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Active and Passive Electronic Components
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Active and Passive Electronic Components
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2011
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Article
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Fig 1
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Research Article
Static and Motional Feedthrough Capacitance of Flexural Microresonator
Figure 1
(a) Schematic cross-sections of the 3C-SiC lateral resonators in the present study. (b) Top and (c) side views of the MEMS resonator.
(a)
(b)
(c)