Static and Motional Feedthrough Capacitance of Flexural Microresonator

Figure 4

Magnitude plots of the flexural-mode resonator measured at (a) 1 torr, (b) 30 mtorr, (c) 15 mtorr, and (d) 30 μtorr. (e) Phase plot of (d) under 30 μtorr.

(a)

(b)

(c)

(d)

(e)