Research Article

Comprehension of Postmetallization Annealed MOCVD- on Treated III-V Semiconductors

Figure 9

(a) Dielectric constant and (b) effective oxide charges of TiO2/S-InP and PMA-TiO2/S-InP at different PMA temperatures.
148705.fig.009a
(a)
148705.fig.009b
(b)