Comparative Study of <svg style="vertical-align:-4.32007pt;width:41.837502px;" id="M1" height="20.4125" version="1.1" viewBox="0 0 41.837502 20.4125" width="41.837502" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,0,0,-.022,.062,14.975)"><path id="x53" d="M409 504l-29 -5q-16 60 -44.5 96t-86.5 36q-54 0 -82.5 -32t-28.5 -77q0 -51 30.5 -82.5t96.5 -65.5l35.5 -18t33 -19.5t33.5 -23.5l27 -25.5t24.5 -32t13.5 -36.5t6 -45q0 -80 -62 -134.5t-160 -54.5q-47 0 -98 15q-22 7 -50 21q-8 23 -27 155l30 7q7 -27 18 -52
t30 -51.5t49 -42.5t67 -16q56 0 88 32.5t32 87.5q0 51 -31.5 82t-98.5 67q-80 44 -110 73q-55 53 -55 124q0 75 56 126.5t150 51.5q53 0 126 -23z" /></g><g transform="matrix(.022,0,0,-.022,10.553,14.975)"><path id="x69" d="M135 536q-20 0 -35 15.5t-15 35.5q0 22 15 37t36 15t35.5 -15t14.5 -37q0 -21 -15 -36t-36 -15zM252 0h-220v26q48 5 59 17t11 63v206q0 47 -9 58t-54 18v24q78 12 142 39v-345q0 -51 11.5 -63t59.5 -17v-26z" /></g><g transform="matrix(.022,0,0,-.022,16.561,14.975)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g><g transform="matrix(.016,0,0,-.016,33.3,20.35)"><path id="x1D7D0" d="M453 211h25l-46 -211h-415v23q97 102 151 166q42 49 81 110q51 78 51 148q0 56 -31.5 91.5t-87.5 35.5q-77 0 -122 -90h-28q67 204 223 204q82 0 132 -49.5t50 -133.5q0 -110 -114 -218l-162 -154h140q82 0 107 13q27 13 46 65z" /></g></svg>, <svg style="vertical-align:-4.49648pt;width:55.037498px;" id="M2" height="21.6875" version="1.1" viewBox="0 0 55.037498 21.6875" width="55.037498" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,0,0,-.022,.062,16.025)"><path id="x41" d="M673 0h-245v28q47 6 58 16t1 39l-55 154h-213q-31 -87 -36 -129q-16 -47 -5 -61t68 -19v-28h-226v28q50 7 68.5 23.5t43.5 80.5l214 524l24 9l193 -536q23 -63 41.5 -79.5t68.5 -21.5v-28zM418 280l-81 255h-2q-74 -197 -101 -255h184z" /></g><g transform="matrix(.022,0,0,-.022,15.597,16.025)"><path id="x6C" d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" /></g><g transform="matrix(.016,0,0,-.016,21.288,21.4)"><use xlink:href="#x1D7D0" /></g><g transform="matrix(.022,0,0,-.022,29.763,16.025)"><use xlink:href="#x4F" /></g><g transform="matrix(.016,0,0,-.016,46.5,21.4)"><path id="x1D7D1" d="M58 524l-21 12q80 152 229 152q73 0 119 -41q45 -41 45 -96q0 -40 -21.5 -74.5t-62.5 -52.5q57 -20 89.5 -68.5t32.5 -109.5q0 -110 -86 -185t-214 -75q-69 0 -110.5 24.5t-41.5 65.5q0 26 18.5 43t46.5 17q45 0 96 -57q39 -43 79 -43q45 0 71.5 34t26.5 88q0 75 -49 121
q-25 23 -56 39q-34 17 -97 38v17q69 21 100 53t31 78q0 103 -99 103q-40 0 -69.5 -19t-56.5 -64z" /></g></svg>, and BeO Ultrathin Interfacial Barrier Layers in Si Metal-Oxide-Semiconductor Devices

<table>Stress-induced <svg height="15.4" id="M6" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 22.924999 15.4" width="22.924999" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,11.113)"><path d="M730 650l-8 -28q-52 -4 -72 -18t-64 -77q-79 -113 -321 -539h-33l-119 541q-13 59 -29.5 73t-66.5 20l7 28h245l-8 -28l-28 -5q-33 -6 -40.5 -15.5t-0.5 -38.5l102 -450h2q191 320 246 430q21 42 15.5 56t-43.5 19l-31 4l7 28h240z" id="x1D449"></path></g>
<g transform="matrix(.012,0,0,-.012,12.675,15.188)"><path d="M54 437h47v21q0 48 11 83q23 72 77 118q55 46 110 53q53 -3 79 -34q13 -16 5 -35q-5 -13 -19 -24t-27 3q-37 37 -81 37q-34 0 -53 -29q-24 -37 -23 -153v-40h118q5 -7 1.5 -21t-11.5 -19h-108v-287q0 -55 13 -67t73 -18v-25h-236v26q49 5 60 16.5t11 60.5v294h-70l-4 11z
" id="x66"></path></g><g transform="matrix(.012,0,0,-.012,16.197,15.188)"><path d="M152 404l81 35q23 10 41 10q81 0 139 -61.5t58 -149.5q0 -107 -74.5 -178.5t-176.5 -71.5q-71 0 -147 36v555q0 48 -9.5 59.5t-56.5 15.5v23q79 10 145 35v-308zM152 374v-258q0 -20 6 -35q7 -19 30 -37t58 -18q63 0 99.5 50t36.5 137q0 82 -43.5 131t-108.5 49
q-44 0 -78 -19z" id="x62"></path></g>
</svg> shift (<svg height="15.65" id="M7" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 33.825001 15.65" width="33.825001" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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<g transform="matrix(.012,0,0,-.012,23.575,15.45)"><path d="M54 437h47v21q0 48 11 83q23 72 77 118q55 46 110 53q53 -3 79 -34q13 -16 5 -35q-5 -13 -19 -24t-27 3q-37 37 -81 37q-34 0 -53 -29q-24 -37 -23 -153v-40h118q5 -7 1.5 -21t-11.5 -19h-108v-287q0 -55 13 -67t73 -18v-25h-236v26q49 5 60 16.5t11 60.5v294h-70l-4 11z
" id="x66"></path></g><g transform="matrix(.012,0,0,-.012,27.097,15.45)"><path d="M152 404l81 35q23 10 41 10q81 0 139 -61.5t58 -149.5q0 -107 -74.5 -178.5t-176.5 -71.5q-71 0 -147 36v555q0 48 -9.5 59.5t-56.5 15.5v23q79 10 145 35v-308zM152 374v-258q0 -20 6 -35q7 -19 30 -37t58 -18q63 0 99.5 50t36.5 137q0 82 -43.5 131t-108.5 49
q-44 0 -78 -19z" id="x62"></path></g>
</svg>) versus stress time for three different gate stacks. <svg height="19.375" id="M8" style="vertical-align:-5.76988pt" version="1.1" viewbox="0 0 155.0125 19.375" width="155.0125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,12.138)"><path d="M609 650l-19 -162l-30 -2q2 69 -14 94q-9 18 -28.5 26t-74.5 8h-88q-30 0 -37 -6.5t-12 -36.5l-41 -212h103q48 0 69 5.5t32 19t26 50.5h29l-40 -198h-30q2 58 -11.5 70.5t-85.5 12.5h-99l-30 -167q-17 -87 3 -101q18 -15 111 -15q59 0 89 7t54 27q8 7 15.5 16t16 21.5
l14 20.5t15 23.5t13.5 21.5l29 -10q-52 -129 -71 -163h-500l6 28q66 4 83 17.5t28 73.5l77 409q11 61 -0.5 75.5t-78.5 18.5l10 28h467z" id="x1D438"></path></g>
<g transform="matrix(.012,0,0,-.012,10.8,16.213)"><path d="M380 106l15 -22q-42 -52 -87 -74t-76 -22q-89 0 -142 62t-53 151q0 103 66 175q67 73 146 73h1q61 0 105.5 -46.5t44.5 -105.5q0 -16 -4.5 -22.5t-18.5 -9.5q-54 -10 -262 -17q1 -95 46 -143.5t104 -48.5q61 0 115 50zM225 412q-35 0 -64.5 -32.5t-40.5 -90.5q83 0 170 3
q14 0 19 4.5t5 15.5q1 41 -23.5 70.5t-65.5 29.5z" id="x65"></path></g><g transform="matrix(.012,0,0,-.012,15.857,16.213)"><path d="M187 566v-116h189c1.33478 44.0001 4.00146 75.3334 8 94c5.33411 24.0005 14.0008 46.3339 26 67c28 48 75 72 141 72c30.0005 0 54.8339 -5.83331 74.5 -17.5c19.6691 -11.6667 29.5024 -26.5 29.5 -44.5c0 -11.3368 -4 -21.0035 -12 -29c-8 -8 -18 -12 -30 -12
c-16 0 -31 12 -45 36c-16.0016 26 -33.6682 39 -53 39c-37.3333 -0.000915527 -56 -29.6676 -56 -89v-116h115v-32h-115v-315c0 -37.3333 5 -61 15 -71c11.3333 -10.6667 37.3333 -16.3333 78 -17v-15h-245v15c28.6667 2 47 8.33333 55 19c8.66666 10.6667 13 34 13 70v314
h-188v-314c0 -38 3.66667 -61.6667 11 -71c6.66667 -8.66667 25.6667 -14.6667 57 -18v-15h-235v15c36.6667 2 59.3333 8 68 18c10 11.3333 15 35 15 71v314h-82v32h82c1.33344 43.3338 4.0001 74.3338 8 93c4.66666 22 13.6667 44.6667 27 68c28 48 75 72 141 72
c29.3333 0 52.8333 -5.83331 70.5 -17.5s26.5 -26.5 26.5 -44.5c0 -11.3368 -4 -21.0035 -12 -29c-8 -8 -18 -12 -30 -12c-8 0 -14.1667 2.16669 -18.5 6.5s-10.8333 14.1667 -19.5 29.5c-16 26 -33.6667 39 -53 39c-37.3335 -0.000915527 -56.0001 -29.6676 -56 -89z" id="xFB00"></path></g>
<g transform="matrix(.017,0,0,-.017,28.4,12.138)"><path d="M535 323h-483v50h483v-50zM535 138h-483v50h483v-50z" id="x3D"></path></g><g transform="matrix(.017,0,0,-.017,43.104,12.138)"><path d="M300 -147l-18 -23q-106 71 -159 185.5t-53 254.5v1q0 139 53 252.5t159 186.5l18 -24q-74 -62 -115.5 -173.5t-41.5 -242.5q0 -130 41.5 -242.5t115.5 -174.5z" id="x28"></path></g><g transform="matrix(.017,0,0,-.017,48.985,12.138)"><path d="M730 650l-8 -28q-52 -4 -72 -18t-64 -77q-79 -113 -321 -539h-33l-119 541q-13 59 -29.5 73t-66.5 20l7 28h245l-8 -28l-28 -5q-33 -6 -40.5 -15.5t-0.5 -38.5l102 -450h2q191 320 246 430q21 42 15.5 56t-43.5 19l-31 4l7 28h240z" id="x1D449"></path></g>
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t-20.5 85q0 74 32.5 145.5t84.5 117.5q40 35 100 58.5t117 23.5q21 0 65 -8q30 -6 44 -6zM456 386q-40 16 -81 16q-29 0 -64 -13q-42 -17 -85 -97q-19 -36 -31.5 -86t-12.5 -86q0 -64 30 -64q20 0 52.5 21t60.5 52q74 81 95 123q26 62 36 134z" id="x1D454"></path></g>
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<g transform="matrix(.012,0,0,-.012,99.138,16.213)"><path d="M54 437h47v21q0 48 11 83q23 72 77 118q55 46 110 53q53 -3 79 -34q13 -16 5 -35q-5 -13 -19 -24t-27 3q-37 37 -81 37q-34 0 -53 -29q-24 -37 -23 -153v-40h118q5 -7 1.5 -21t-11.5 -19h-108v-287q0 -55 13 -67t73 -18v-25h-236v26q49 5 60 16.5t11 60.5v294h-70l-4 11z
" id="x66"></path></g><g transform="matrix(.012,0,0,-.012,102.66,16.213)"><path d="M152 404l81 35q23 10 41 10q81 0 139 -61.5t58 -149.5q0 -107 -74.5 -178.5t-176.5 -71.5q-71 0 -147 36v555q0 48 -9.5 59.5t-56.5 15.5v23q79 10 145 35v-308zM152 374v-258q0 -20 6 -35q7 -19 30 -37t58 -18q63 0 99.5 50t36.5 137q0 82 -43.5 131t-108.5 49
q-44 0 -78 -19z" id="x62"></path></g>
<g transform="matrix(.017,0,0,-.017,109.325,12.138)"><path d="M275 270q0 -296 -211 -440l-19 23q75 62 116.5 174t41.5 243t-42 243t-116 173l19 24q211 -144 211 -440z" id="x29"></path></g><g transform="matrix(.017,0,0,-.017,115.207,12.138)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g>
<g transform="matrix(.017,0,0,-.017,122.213,12.138)"><path d="M517 162l29 -4q-18 -100 -35 -158h-482v28q68 5 83.5 20t15.5 77v398q0 66 -13 80t-73 19v28h446q0 -8 8 -144l-29 -4q-11 51 -32 85q-11 17 -35 23t-78 6h-76q-23 0 -28 -5t-5 -27v-228h94q67 0 83 12t25 63h29v-191h-29q-10 54 -26 65.5t-81 11.5h-95v-189
q0 -65 24 -81q19 -13 104 -13q57 0 83 7t43 27q28 33 50 94z" id="x45"></path></g><g transform="matrix(.017,0,0,-.017,131.868,12.138)"><path d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" id="x4F"></path></g><g transform="matrix(.017,0,0,-.017,144.481,12.138)"><path d="M592 498l-30 -3q-13 63 -31 89q-13 19 -33.5 25.5t-75.5 6.5h-70v-493q0 -60 16 -75.5t86 -19.5v-28h-286v28q68 4 83.5 19.5t15.5 75.5v493h-62q-60 0 -83 -7t-33 -24q-12 -17 -32 -90h-29q10 116 12 180h20q10 -16 21 -20.5t34 -4.5h395q19 0 28.5 5t21.5 20h21
q2 -89 11 -177z" id="x54"></path></g>
</svg>.</table>

Active and Passive Electronic Components

fig5

Figure 5

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t30 -51.5t49 -42.5t67 -16q56 0 88 32.5t32 87.5q0 51 -31.5 82t-98.5 67q-80 44 -110 73q-55 53 -55 124q0 75 56 126.5t150 51.5q53 0 126 -23z" /></g><g transform="matrix(.022,0,0,-.022,10.553,14.975)"><path id="x69" d="M135 536q-20 0 -35 15.5t-15 35.5q0 22 15 37t36 15t35.5 -15t14.5 -37q0 -21 -15 -36t-36 -15zM252 0h-220v26q48 5 59 17t11 63v206q0 47 -9 58t-54 18v24q78 12 142 39v-345q0 -51 11.5 -63t59.5 -17v-26z" /></g><g transform="matrix(.022,0,0,-.022,16.561,14.975)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g><g transform="matrix(.016,0,0,-.016,33.3,20.35)"><path id="x1D7D0" d="M453 211h25l-46 -211h-415v23q97 102 151 166q42 49 81 110q51 78 51 148q0 56 -31.5 91.5t-87.5 35.5q-77 0 -122 -90h-28q67 204 223 204q82 0 132 -49.5t50 -133.5q0 -110 -114 -218l-162 -154h140q82 0 107 13q27 13 46 65z" /></g></svg>, <svg style="vertical-align:-4.49648pt;width:55.037498px;" id="M2" height="21.6875" version="1.1" viewBox="0 0 55.037498 21.6875" width="55.037498" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,0,0,-.022,.062,16.025)"><path id="x41" d="M673 0h-245v28q47 6 58 16t1 39l-55 154h-213q-31 -87 -36 -129q-16 -47 -5 -61t68 -19v-28h-226v28q50 7 68.5 23.5t43.5 80.5l214 524l24 9l193 -536q23 -63 41.5 -79.5t68.5 -21.5v-28zM418 280l-81 255h-2q-74 -197 -101 -255h184z" /></g><g transform="matrix(.022,0,0,-.022,15.597,16.025)"><path id="x6C" d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" /></g><g transform="matrix(.016,0,0,-.016,21.288,21.4)"><use xlink:href="#x1D7D0" /></g><g transform="matrix(.022,0,0,-.022,29.763,16.025)"><use xlink:href="#x4F" /></g><g transform="matrix(.016,0,0,-.016,46.5,21.4)"><path id="x1D7D1" d="M58 524l-21 12q80 152 229 152q73 0 119 -41q45 -41 45 -96q0 -40 -21.5 -74.5t-62.5 -52.5q57 -20 89.5 -68.5t32.5 -109.5q0 -110 -86 -185t-214 -75q-69 0 -110.5 24.5t-41.5 65.5q0 26 18.5 43t46.5 17q45 0 96 -57q39 -43 79 -43q45 0 71.5 34t26.5 88q0 75 -49 121
q-25 23 -56 39q-34 17 -97 38v17q69 21 100 53t31 78q0 103 -99 103q-40 0 -69.5 -19t-56.5 -64z" /></g></svg>, and BeO Ultrathin Interfacial Barrier Layers in Si Metal-Oxide-Semiconductor Devices 

Active and Passive Electronic Components

Comparative Study of , , and BeO Ultrathin Interfacial Barrier Layers in Si Metal-Oxide-Semiconductor Devices

Figure 5