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<table>Stress-induced leakage current (<svg height="19.262501" id="M9" style="vertical-align:-5.76988pt" version="1.1" viewbox="0 0 47.287498 19.262501" width="47.287498" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>.</table>

Active and Passive Electronic Components

fig6

Figure 6

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Active and Passive Electronic Components

Comparative Study of , , and BeO Ultrathin Interfacial Barrier Layers in Si Metal-Oxide-Semiconductor Devices

Figure 6