Table 1: The Hall measurement and surface roughness results for various treatment devices.

PretreatmentMobility
(cm2/V-sec)
Sheet charge density (cm−2)Surface roughness (nm)

Standard10601.648 × 10130.238
(NH4)2 9851.784 × 10130.514
(NH4)2 + UV10871.512 × 10130.471
P2S5/(NH4)2 11001.485 × 10130.443
P2S5/(NH4)2 + UV11501.403 × 10130.382