Analysis of Kink Reduction in SOI MOSFET Using Selective Back Oxide Structure

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="565827.fig.007a" src="https://static.hindawi.com/articles/apec/volume-2012/565827/figures/565827.fig.007a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Hole current density for gap width 0.004 <i><i>μ</i></i>m</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="565827.fig.007b" src="https://static.hindawi.com/articles/apec/volume-2012/565827/figures/565827.fig.007b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Hole current density for gap width 0.02 <i><i>μ</i></i>m</td></tr></table></td></tr><tr class="fig-image" id="c"><td><img alt="565827.fig.007c" src="https://static.hindawi.com/articles/apec/volume-2012/565827/figures/565827.fig.007c.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(c) </b>Hole current density for gap width 0.1 <i><i>μ</i></i>m</td></tr></table></td></tr></table>

<table>Silvaco simulation results indicating the hole current density in SELBOX MOSFET through the oxide gap for varying gap lengths.</table>

Active and Passive Electronic Components

fig7

Figure 7

Figure 7: Analysis of Kink Reduction in SOI MOSFET Using Selective Back Oxide Structure 