Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

<table>The function image of <svg height="16.625" id="M50" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 46.700001 16.625" width="46.700001" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,12.138)"><path d="M546 430q-14 -33 -37.5 -140t-38.5 -209q-29 -195 -156 -289q-29 -21 -70 -37t-78 -16q-62 0 -102.5 37t-40.5 69q0 27 26 48q19 15 25 -3q13 -43 46.5 -69t87.5 -26q55 0 83 21q29 22 50 65t43 140q14 64 29 163h-2q-55 -81 -149 -152q-59 -44 -102 -44q-23 0 -43.5 30
t-20.5 85q0 74 32.5 145.5t84.5 117.5q40 35 100 58.5t117 23.5q21 0 65 -8q30 -6 44 -6zM456 386q-40 16 -81 16q-29 0 -64 -13q-42 -17 -85 -97q-19 -36 -31.5 -86t-12.5 -86q0 -64 30 -64q20 0 52.5 21t60.5 52q74 81 95 123q26 62 36 134z" id="x1D454"></path></g><g transform="matrix(.017,0,0,-.017,9.735,12.138)"><path d="M300 -147l-18 -23q-106 71 -159 185.5t-53 254.5v1q0 139 53 252.5t159 186.5l18 -24q-74 -62 -115.5 -173.5t-41.5 -242.5q0 -130 41.5 -242.5t115.5 -174.5z" id="x28"></path></g><g transform="matrix(.017,0,0,-.017,15.616,12.138)"><path d="M570 304q0 -108 -87 -199q-40 -42 -94.5 -74t-105.5 -43q-41 0 -65 11l-29 -141q-9 -45 -1.5 -58t45.5 -16l26 -2l-5 -29l-241 -10l4 26q51 10 67.5 24t26.5 60l113 520q-54 -20 -89 -41l-7 26q38 28 105 53l11 49q20 25 77 58l8 -7l-17 -77q39 14 102 14q82 0 119 -36
t37 -108zM482 289q0 114 -113 114q-26 0 -66 -7l-70 -327q12 -14 32 -25t39 -11q59 0 118.5 81.5t59.5 174.5z" id="x1D45D"></path></g><g transform="matrix(.017,0,0,-.017,25.697,12.138)"><path d="M95 130q31 0 61 -30t30 -78q0 -53 -38 -87.5t-93 -51.5l-11 29q77 31 77 85q0 26 -17.5 43t-44.5 24q-4 0 -8.5 6.5t-4.5 17.5q0 18 15 30t34 12z" id="x2C"></path></g><g transform="matrix(.017,0,0,-.017,32.394,12.138)"><path d="M474 429q-19 -69 -47 -222l-65 -347q-8 -49 0 -60t49 -16l26 -3l-4 -26l-246 -12l4 25l17 3q37 6 50 20.5t23 60.5l67 321h-2q-65 -79 -150 -138q-69 -47 -104 -47q-28 0 -48.5 32t-20.5 81q0 78 35 148t90 117q67 57 161 77q23 5 58 5q43 0 90 -15zM387 387
q-30 16 -75 16q-58 0 -92 -27q-49 -39 -78.5 -112t-29.5 -136q0 -34 8.5 -52.5t21.5 -18.5q40 0 109.5 63.5t103.5 115.5q16 53 32 151z" id="x1D45E"></path></g><g transform="matrix(.017,0,0,-.017,40.741,12.138)"><path d="M275 270q0 -296 -211 -440l-19 23q75 62 116.5 174t41.5 243t-42 243t-116 173l19 24q211 -144 211 -440z" id="x29"></path></g>
</svg>.</table>

Active and Passive Electronic Components

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Figure 4

Figure 4: Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor 