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Active and Passive Electronic Components
Volume 2012 (2012), Article ID 834961, 7 pages
http://dx.doi.org/10.1155/2012/834961
Research Article

Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, China

Received 5 March 2012; Revised 12 May 2012; Accepted 15 May 2012

Academic Editor: Ching Liang Dai

Copyright © 2012 Kai Yang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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