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Active and Passive Electronic Components
Volume 2012 (2012), Article ID 834961, 7 pages
Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor
Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, China
Received 5 March 2012; Revised 12 May 2012; Accepted 15 May 2012
Academic Editor: Ching Liang Dai
Copyright © 2012 Kai Yang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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