Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor

Table 1

Geometric and material data of the T-shaped piezoelectric ZnO cantilever.

Layer	Density	Young’s modulus	Thickness
	(Kg/m^3)	(GPa)	(𝜇m)
ZnO	5676 [10]	209.7 [10]	2
Si3N4	3170 [10]	270 [10]	0.5