Table 1:
Geometric and material data of the T-shaped piezoelectric ZnO cantilever.
Layer
Density
Young’s modulus
Thickness
(Kg/m
3
)
(GPa)
(
m)
ZnO
5676 [10]
209.7 [10]
2
Si
3
N
4
3170 [10]
270 [10]
0.5