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Active and Passive Electronic Components
Volume 2012 (2012), Article ID 871620, 8 pages
doi:10.1155/2012/871620
Research Article
Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography
Sibley School of Mechanical and Aerospace Engineering, Cornell University, Ithaca, NY 14853, USA
Received 16 June 2011; Revised 16 January 2012; Accepted 23 January 2012
Academic Editor: Egidio Ragonese
Copyright © 2012 Timothy Reissman et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
How to Cite this Article
Timothy Reissman, Joon-Sik Park, and Ephrahim Garcia, “Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography,” Active and Passive Electronic Components, vol. 2012, Article ID 871620, 8 pages, 2012. doi:10.1155/2012/871620