Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography

<table><i>π</i>-type electrical model of a single-layer, spiral inductor.</table>

Active and Passive Electronic Components

Figure 2: Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography 