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Active and Passive Electronic Components
Volume 2012 (2012), Article ID 871620, 8 pages
doi:10.1155/2012/871620
Research Article

Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography

Timothy Reissman, Joon-Sik Park, and Ephrahim Garcia

Sibley School of Mechanical and Aerospace Engineering, Cornell University, Ithaca, NY 14853, USA

Received 16 June 2011; Revised 16 January 2012; Accepted 23 January 2012

Academic Editor: Egidio Ragonese

Copyright © 2012 Timothy Reissman et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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