Table 1: MLSI geometric variations.

DesignTrace width (μm)Trace thickness (μm)Trace spacing (μm)Trace turns per layerInner diameter (mm)Outer diameter (mm)Dielectric layer (SU-8 photoresist) (μm)Number of stacked inductor layersMLSI volume (mm3)

11501.15015612.030310.54
22001.65015613.51034.98
31502.15015612.030310.9