Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band

Table 6

Comparisons of 1D and 3D FEM of Filter B.

Parameters	Series FBAR		Shunt FBAR
	1D	3D FEM	1D	3D FEM
𝐶𝑜 (pF)	0.468	0.471	0.0901	0.107
𝐶𝑚 (pF)	0.024	0.025	0.058	0.058
𝐿𝑚 (nH)	4.20	3.97	23.58	19.96
𝑘^2eff (%)	6.06	6.36	6.54	6.51
𝑓𝑠 (GHz)	15.90	15.87	14.70	14.67
𝑓𝑝 (GHz)	16.30	16.29	15.10	15.12