A Novel Nanoscale FDSOI MOSFET with Block-Oxide

<table>Comparison of bFDSOI and SOI MOSFETs <svg height="15.725" id="M60" style="vertical-align:-3.41936pt" version="1.1" viewbox="0 0 58.637501 15.725" width="58.637501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.4)"><path d="M713 296l-5 -25q-47 -7 -59 -20t-23 -72l-15 -79q-9 -48 -3 -74q-15 -3 -55 -13t-63 -15t-59.5 -10t-70.5 -5q-149 0 -243 80t-94 220q0 169 127.5 276.5t336.5 107.5q91 0 206 -36l-10 -165l-29 -1q1 85 -47.5 126t-146.5 41q-153 0 -243.5 -97t-90.5 -242
q0 -122 68.5 -198.5t188.5 -76.5q121 0 139 75l20 86q13 58 -1.5 70.5t-99.5 20.5l5 26h267z" id="x1D43A"></path></g>
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q45 4 67 18.5t35 45.5q16 38 74 233l52 173q24 79 11.5 98t-89.5 26l6 28h177l136 -508l337 508h172z" id="x1D440"></path></g>
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<g transform="matrix(.012,-0,0,-.012,43.8,15.475)"><path d="M692 302v-28q-45 -6 -54.5 -17t-9.5 -55v-86q0 -62 7 -95q-7 -2 -32 -7.5l-37 -8l-35.5 -7.5t-40.5 -7t-38.5 -4t-40.5 -2q-165 0 -266 93t-101 243q0 84 32 151t86 108t121.5 63t142.5 22q29 0 62.5 -4t52 -7.5t47.5 -10.5t31 -7l15 -156l-28 -6q-17 87 -66.5 121.5
t-128.5 34.5q-117 0 -191 -80.5t-74 -216.5q0 -56 17 -110t49.5 -100.5t87.5 -74.5t124 -28q53 0 87 17q17 9 24.5 23t7.5 43v85q0 54 -15.5 67.5t-89.5 18.5v28h254z" id="x47"></path></g><g transform="matrix(.012,-0,0,-.012,52.308,15.475)"><path d="M409 504l-29 -5q-16 60 -44.5 96t-86.5 36q-54 0 -82.5 -32t-28.5 -77q0 -51 30.5 -82.5t96.5 -65.5l35.5 -18t33 -19.5t33.5 -23.5l27 -25.5t24.5 -32t13.5 -36.5t6 -45q0 -80 -62 -134.5t-160 -54.5q-47 0 -98 15q-22 7 -50 21q-8 23 -27 155l30 7q7 -27 18 -52
t30 -51.5t49 -42.5t67 -16q56 0 88 32.5t32 87.5q0 51 -31.5 82t-98.5 67q-80 44 -110 73q-55 53 -55 124q0 75 56 126.5t150 51.5q53 0 126 -23z" id="x53"></path></g>
</svg> characteristics with gate length <svg height="15.45" id="M61" style="vertical-align:-3.43848pt" version="1.1" viewbox="0 0 54.8125 15.45" width="54.8125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path d="M559 163q-23 -66 -68 -163h-474l6 26q62 4 79.5 19.5t28.5 75.5l78 409q7 35 8.5 49t-8 25t-24 13t-51.5 5l5 28h266l-6 -28q-65 -5 -79.5 -18t-25.5 -74l-76 -406q-10 -57 14 -75q12 -13 96 -13q93 0 126 29q41 40 76 109z" id="x1D43F"></path></g>
<g transform="matrix(.012,-0,0,-.012,9.763,15.187)"><path d="M713 296l-5 -25q-47 -7 -59 -20t-23 -72l-15 -79q-9 -48 -3 -74q-15 -3 -55 -13t-63 -15t-59.5 -10t-70.5 -5q-149 0 -243 80t-94 220q0 169 127.5 276.5t336.5 107.5q91 0 206 -36l-10 -165l-29 -1q1 85 -47.5 126t-146.5 41q-153 0 -243.5 -97t-90.5 -242
q0 -122 68.5 -198.5t188.5 -76.5q121 0 139 75l20 86q13 58 -1.5 70.5t-99.5 20.5l5 26h267z" id="x1D43A"></path></g>
<g transform="matrix(.017,-0,0,-.017,23.725,11.112)"><path d="M535 323h-483v50h483v-50zM535 138h-483v50h483v-50z" id="x3D"></path></g><g transform="matrix(.017,-0,0,-.017,38.412,11.112)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
q0 45 -26.5 69.5t-68.5 24.5q-67 0 -120 -79l-20 20l43 63q51 56 127 56h1q66 0 107 -37t41 -95q0 -42 -31 -71q-22 -23 -68 -54z" id="x33"></path></g><g transform="matrix(.017,-0,0,-.017,46.571,11.112)"><path d="M137 343l67 33q37 17 63 17q79 0 129.5 -53t50.5 -131q0 -92 -58 -156.5t-147 -64.5t-147 68t-58 182q0 63 17 119t43 95.5t61.5 72t69 52t67.5 31.5q62 22 128 33l6 -32q-56 -11 -108 -35q-149 -71 -184 -231zM227 337q-47 0 -95 -27q-6 -23 -6 -70q0 -93 36 -155.5
t96 -62.5q53 0 78 45.5t25 105.5q0 68 -35 116t-99 48z" id="x36"></path></g>
</svg> nm.</table>

Active and Passive Electronic Components

A Novel Nanoscale FDSOI MOSFET with Block-Oxide

Figure 4