Research Article

Influence of Series Massive Resistance on Capacitance and Conductance Characteristics in Gate-Recessed Nanoscale SOI MOSFETs

Figure 6

Parallel mode - and - characteristics for several channel thicknesses . Devices have the same gate area ( µm2 =   cm2). (a) Capacitance ( ) measured at 100 kHz. (b) Conductance measured at 100 kHz. (c) Capacitance ( ) measured at 1 MHz. (d) Conductance measured at 1 MHz.
813518.fig.006a
(a)
813518.fig.006b
(b)
813518.fig.006c
(c)
813518.fig.006d
(d)