Research Article
Comprehensive Optimization of Dual Threshold Independent-Gate FinFET and SRAM Cells
Figure 2
The cross section of the symmetric Independent-Gate High-K Metal gate FinFET with interfacial oxide between channel and high-k dielectric in TCAD simulation (NSD=1.0e20cmā3, Nbody=1.0e12cmā3, L=14nm, HFin=40nm).