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Advances in Tribology
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Advances in Tribology
/
2012
/
Article
/
Tab 1
/
Research Article
Mechanical and Tribological Properties of PVD-Coated Cemented Carbide as Evaluated by a New Multipass Scratch-Testing Method
Table 1
Deposition process parameters and thickness for the coatings investigated.
Ti
0.86
Si
0.14
N
Ti
0.34
Al
0.66
N
(Al
0.7
Cr
0.3
)
2
O
3
Thickness (
m)
2.5
2.5
3.5
Cathode
Ti
0.80
Si
0.20
Ti
0.33
Al
0.67
Al
0.70
Cr
0.30
Atmosphere
N
2
N
2
O
2
Pressure (Pa)
4
4
1
Bias (V)
−30
−50
−100
Temp. (°C)
450
450
550