Dependence of Pin Surface Roughness for Friction Forces of Ultrathin Perfluoropolyether Lubricant Film on Magnetic Disks by Pin-on-Disk Test

Table 1

Conditions for GCIB processing and surface roughness.

No.	Dose, ion/cm^2		DLC	Roughness, nm
	Ar × 10^16	N2  × 10^16	nm	𝑅𝑎	𝑅𝑞	𝑅𝑝_ave
1	0	0	0	1.40	3.01	10.26
2	2	0	0	4.30	6.35	34.83
3	1	2	0	1.08	1.40	4.99
4	1	0	300	1.51	2.16	17.33
5	2	0	300	1.07	1.39	7.87
6	4	0	300	1.05	1.37	13.63