| | Sample | Debris chemistry | Near-surface chemistry | | Oxygen (At%) | Carbon (At%) | Nitrogen (At%) | Oxygen (At%) | Carbon (At%) | Nitrogen (At%) |
| | Unimplanted | 7.2, 1.5 | 2.1, 1.3 | NA | 0.3 | <0.1 | 0.0 | | Unimplanted, 7% reduction | 8.1, 1.3 | 2.4, 0.5 | NA | 0.4 | <0.1 | 0.0 | | Unimplanted, 15% reduction | 6.3, 1.7 | 2.9, 0.9 | NA | 0.2 | <0.1 | 0.0 | | Unimplanted, 30% reduction | 6.4, 1.4 | 3.0, 0.8 | NA | 0.1 | <0.1 | 0.0 | | Unimplanted, 67% reduction | 6.2, 1.9 | 2.5, 0.5 | NA | 0.2 | <0.1 | 0.0 | | Unimplanted, 100% reduction | 7.1, 1.9 | 2.7, 1.1 | NA | 0.3 | <0.1 | 0.0 | | Unimplanted, 200% reduction | 6.9, 1.5 | 2.2, 1.5 | NA | 0.1 | <0.1 | 0.0 | | N+ implanted, 5e16 ions/cm2 at 100 kV | 11.7, 1.4 | 2.4, 1.1 | 2.1, 0.5 | 1.4 | <0.1 | 3.8 | | N+ implanted, 1e17 ions/cm2 at 100 kV | 12.5, 1.1 | 2.1, 1.7 | 4.0, 0.8 | 2.2 | <0.1 | 7.1 | | N+ implanted, 2e17 ions/cm2 at 100 kV | 16.4, 1.6 | 2.9, 1.2 | 6.5, 1.1 | 3.3 | <0.1 | 12.5 | | N+ implanted, 2e17 ions/cm2 at 50 kV | 15.1, 1.8 | 2.2, 0.8 | 9.9, 0.7 | 2.0 | <0.1 | 10.1 | | N+ implanted, 2e17 ions/cm2 at 100 kV, 100% reduction | 16.6, 1.2 | 2.2, 1.4 | 6.3, 1.7 | 3.1 | <0.1 | 12.7 | | N+ implanted, 2e17 ions/cm2 at 50 kV, 100% reduction | 16.2, 1.5 | 2.7, 1.2 | 9.1, 0.5 | 2.0 | <0.1 | 10.3 | | N+ implanted, 2e17 ions/cm2 at 100 kV heat treated | 16.9, 1.3 | 2.1, 1.6 | 3.9, 1.1 | 3.9 | <0.1 | 12.1 | | N+ implanted, 2e17 ions/cm2 at 100 kV, 100% reduction, heat treated | 16.1, 2.2 | 2.6, 1.7 | 7.0, 1.3 | 4.0 | <0.1 | 12.2 |
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