Table 1: Debris and near-surface chemistries for the samples used in this test.

Sample Debris chemistryNear-surface chemistry
Oxygen (At%)Carbon (At%)Nitrogen (At%)Oxygen (At%)Carbon (At%)Nitrogen (At%)

Unimplanted7.2, 1.52.1, 1.3NA0.3<0.10.0
Unimplanted, 7% reduction 8.1, 1.32.4, 0.5NA0.4<0.10.0
Unimplanted, 15% reduction6.3, 1.72.9, 0.9NA0.2<0.10.0
Unimplanted, 30% reduction6.4, 1.43.0, 0.8NA0.1<0.10.0
Unimplanted, 67% reduction6.2, 1.92.5, 0.5NA0.2<0.10.0
Unimplanted, 100% reduction7.1, 1.92.7, 1.1NA0.3<0.10.0
Unimplanted, 200% reduction6.9, 1.52.2, 1.5NA0.1<0.10.0
N+ implanted, 5e16 ions/cm2 at 100 kV11.7, 1.42.4, 1.12.1, 0.51.4<0.13.8
N+ implanted, 1e17 ions/cm2 at 100 kV12.5, 1.12.1, 1.74.0, 0.82.2<0.17.1
N+ implanted, 2e17 ions/cm2 at 100 kV16.4, 1.62.9, 1.26.5, 1.13.3<0.112.5
N+ implanted, 2e17 ions/cm2 at 50 kV15.1, 1.82.2, 0.89.9, 0.72.0<0.110.1
N+ implanted, 2e17 ions/cm2 at 100 kV, 100% reduction16.6, 1.22.2, 1.46.3, 1.73.1<0.112.7
N+ implanted, 2e17 ions/cm2 at 50 kV, 100% reduction16.2, 1.52.7, 1.29.1, 0.52.0<0.110.3
N+ implanted, 2e17 ions/cm2 at 100 kV heat treated 16.9, 1.32.1, 1.63.9, 1.13.9<0.112.1
N+ implanted, 2e17 ions/cm2 at 100 kV, 100% reduction, heat treated16.1, 2.22.6, 1.77.0, 1.34.0<0.112.2