Table 4: Residual analysis for spherical surfaces.

SampleMeasured RMS/µmMeasured P2V/µm

Sph 60.0600.319
Sph 100.0510.308
Sph 120.0660.369
Sph 12.50.0610.400
Sph 130.0680.435
Sph 13.50.0440.305
Sph 14.50.0600.344
Sph 150.2330.844
Sph 15.50.0660.505
Sph 160.0460.325
Sph 180.0980.564
Sph 200.1000.346

Average0.0790.422
SDV0.0490.149