Table 5: Residual analysis for higher-order surfaces.

SampleMeasurementDesignDifference
RMS/µmP2V/µmRMS/µmP2V/µmRMS/nmP2V/nm

Ho 10.1140.5330.0340.26380270
Ho 20.2511.3530.1431.125108228
Ho 30.3332.2790.2551.93878341
Ho 40.1660.8830.0460.306120577
Ho 50.1510.9430.0960.64155302
Ho 60.2631.6170.1240.845139772

Average0.0970.415
SDV0.0990.439