Table 6: Residual analysis for freeform surface geometries.

SampleMeasurementDesignDifference
RMS/µmP2V/µmRMS/µmP2V/µmRMS/nmP2V/nm

Freeform 13.00214.5823.02314.80521223
Freeform 21.7509.8801.6819.60369277