Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

<div>Frequency response functions in Bode representation of the <svg height="6.1673pt" id="M50" style="vertical-align:-0.2063904pt" version="1.1" viewbox="-0.0498162 -5.96091 7.39387 6.1673" width="7.39387pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M536 404C536 423 520 448 491 448C445 448 398 404 308 283L286 338C255 416 242 448 217 448C182 448 138 402 92 341L111 321C149 368 169 378 178 378C188 378 198 363 214 320L254 212C185 117 138 65 107 65C98 65 85 69 82 75C79 82 73 86 65 86C44 86 23 60 23 39C23 7 44 -12 71 -12C119 -12 168 33 265 177L306 61C321 17 347 -12 373 -12C413 -12 465 33 507 96L491 119C459 84 432 60 413 60C395 60 378 92 358 148L321 250C341 279 369 310 389 332C417 363 439 382 456 382C466 382 475 376 481 368C486 361 492 358 496 358C513 358 536 381 536 404Z" id="g113-121"></path></g></svg>-direction long-stroke wafer stage.</div>

Complexity

fig3

Figure 3

Figure 3: Model-Based ILC with a Modified <svg xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg" style="vertical-align:-2.838901pt" id="M1" height="14.2383pt" version="1.1" viewBox="-0.0657574 -11.3994 12.5675 14.2383" width="12.5675pt"><g transform="matrix(.017,0,0,-0.017,0,0)"><path id="g113-82" d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"/></g></svg>-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 

Figure 3 | Model-Based ILC with a Modified -Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage 