Journals
Publish with us
Publishing partnerships
About us
Blog
Complexity
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Complexity
/
2018
/
Article
/
Fig 9
/
Research Article
Model-Based ILC with a Modified
-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage
Figure 9
Converged tracking errors with different times ahead.