Model-Based ILC with a Modified -Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage

Table 1

Parameters in the wafer stage model.

Parameter	Value	Parameter	Value	Parameter	Value
	1/20		23.85		580 μs
	0.0130		0.040		2π × 150 rad/s
	0.0023		0.018		2π × 292 rad/s
	0.0038		0.027		2π × 510 rad/s