Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles
Figure 2
Average nanoparticle size (a) and deposition rate (b) as a function of the Argon flux applied to Ag magnetron, for different aggregation lengths of the Ag magnetron. The aggregation length is the distance between the magnetron and the exit slit of the aggregation zone.
