Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles
Figure 3
Average nanoparticle size (a) and deposition rate (b) as a function of aggregation length of the Ag magnetron, for different Ar fluxes applied to Ag magnetron. The aggregation length is the distance between the magnetron and the exit slit of the aggregation zone.
