Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt
Figure 4
Evolution of the mean size and deposition rate of Co nanoparticles as a function of the argon flux injected into the magnetron and for a fixed total argon flux (a). Atomic deposition rate as a function of the argon flux injected into the magnetron and for a fixed total argon flux (b).
