Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt
Figure 5
Evolution of the mean size and deposition rate of Co nanoparticles as a function of the total argon flux while keeping a fixed argon flux into the Co magnetron (a). Atomic deposition rate as a function of the total argon flux while keeping a fixed argon flux into the Co magnetron (b).
