Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt
Figure 6
Evolution of the mean size and deposition rate of Co nanoparticles as a function of the position of the magnetron into the aggregation zone (a). Atomic deposition rate as a function of the position of the magnetron into the aggregation zone (b).
