Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt

Table 1

Fabrication parameters and results as a function of power applied to the Co magnetron.

Series 𝑃A
Constant parameters	Φ (sccm)			𝐿 (mm)
	Co: 5	M2: 37.5	M3: 37.5	Co: 150	M2: 175	M3: 172
Power Co (W)	Mean size (nm)	NPs rate (NPs/µm^2s)	At rate (10^4 at/µm^2s)	AFM images and files	Size distribution file
4	12.4±1.4	0.23±0.10	2.1±0.8	Images 1–8	Dataset Item 3
5	13.3±1.2	0.12±0.03	1.3±1.3	Images 9–19	Dataset Item 4
6	14.8±0.8	0.06±0.02	0.9±0.9	Images 20–27	Dataset Item 5
Series 𝑃B
Constant parameters	Φ (sccm)			𝐿 (mm)
	Co: 30	M2: 25	M3: 25	Co: 150	M2: 175	M3: 172
Power Co (W)	Mean size (nm)	NPs rate (NPs/µm^2s)	At rate (10^4 at/µm^2s)	AFM images and files	Size distribution file
5	3.9±0.3	0.3±0.1	0.1±0.2	Images 28-29	Dataset Item 6
8	5.2±0.5	0.8±0.1	0.5±0.3	Images 30–32	Dataset Item 7
10	6.0±0.6	2.5±0.1	2.5±0.4	Images 33–35	Dataset Item 8
12	6.2±0.8	1.3±0.2	1.5±0.7	Images 36–39	Dataset Item 9