Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt

Table 2

Fabrication parameters and results as a function of argon flux.

Series ΦA
Constant parameters			Power Co (W)	𝐿 (mm)
			5	Co: 150	M2: 175	M3: 172
Φ (sccm)			Mean size (nm)	NPs rate (NPs/µm^2s)	At rate (10^4 at/µm^2s)	AFM images and files	Size distribution file
Co	M2	M3
5	37.5	37.5	13.3±1.1	0.1±0.4	1.3±0.4	Images 40–50	Dataset Item 10
20	30	30	6.3±0.6	1.1±0.5	1.3±0.2	Images 51–54	Dataset Item 11
40	20	20	3.6±0.8	4.6±0.8	1.0±0.1	Images 55–57	Dataset Item 12
Series ΦB
Constant parameters			ΦCo (sccm)	Power Co (W)	𝐿 (mm)
			10	5	M3: 150	M2: 175	M3: 172
Φ (sccm)			Mean size (nm)	NPs rate (NPs/µm^2s)	At rate (10^4 at/µm^2s)	AFM images and files	Size distribution file
M2	M3
15	15		6.1±0.7	0.8±0.2	0.9±0.6	Images 58–63	Dataset Item 13
25	25		6.6±1.0	3.0±0.3	4.1±1.0	Images 64–66	Dataset Item 14
35	35		7.1±1.4	4.8±0.4	8.2±1.7	Images 67-68	Dataset Item 15
45	45		7.7±1.0	5.5±0.9	12.0±2.8	Images 69–71	Dataset Item 16
55	55		8.4±1.0	4.8±0.8	13.5±3.3	Images 72–74	Dataset Item 17