Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt

Table 3

Fabrication parameters and results as a function of aggregation length of the Co magnetron.

Constant parameters	Φ (sccm)			Power Co (W)	𝐿 (mm)
	Co: 30	M2: 25	M3: 25	10	M2: 175	M3: 172
𝐿Co (mm)	Mean size (nm)	NPs rate (NPs/µm^2s)		At rate (10^4 at/µm^2s)	AFM images and files	Size distribution file
170	6.4±0.7	1.7±0.2		2.1±0.7	Images 75-76	Dataset Item 18
150	6.0±0.6	2.5±0.1		2.6±0.4	Images 77-78	Dataset Item 19
120	5.7±0.6	3.3±0.1		2.9±0.4	Images 79–81	Dataset Item 20
90	5.6±0.4	1.3±0.1		1.1±0.3	Images 82–84	Dataset Item 21
75	5.0±0.6	0.8±0.1		0.5±0.3	Images 85–87	Dataset Item 22