Table 3: TMSOH concentrations measured in a semiconductor fabrication workshop.

Sampling date
Sample volume (L)
TMSOH concentration ( g/m3)
Rep 1Rep 2

06/23/201061.58n.a.
07/08/201061.32n.a.
07/21/2010 1.21n.a.
2.82n.a.
08/02/201065.98n.a.
08/25/2010 1.02n.a.
2.61n.a.
09/30/201063.91n.a.
10/14/2010202.74n.a.
08/25/20116/ 22.5120.19
08/26/2011 23.8027.30

Notes: aSamples at two locations within the same workshop. bCo-located distributed volume replicate samples, cCo-located same volume replicate samples. n.a.: not available.