Table 3: TMSOH concentrations measured in a semiconductor fabrication workshop.
Sampling date
Sample volume (L)
TMSOH concentration (g/m3)
Rep 1
Rep 2
06/23/2010
6
1.58
n.a.
07/08/2010
6
1.32
n.a.
07/21/2010
1.21
n.a.
2.82
n.a.
08/02/2010
6
5.98
n.a.
08/25/2010
1.02
n.a.
2.61
n.a.
09/30/2010
6
3.91
n.a.
10/14/2010
20
2.74
n.a.
08/25/2011
6/
22.51
20.19
08/26/2011
23.80
27.30
Notes: aSamples at two locations within the same workshop. bCo-located distributed volume replicate samples, cCo-located same volume replicate samples. n.a.: not available.