Research Article
Effect of Isopropyl Alcohol Concentration and Etching Time on Wet Chemical Anisotropic Etching of Low-Resistivity Crystalline Silicon Wafer
Figure 10
70 × 70 μm2 optical microscope images for Si wafers’ surface at different : (a) , (b) , (c) , (d) , and (e) .
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| (b) |
| (c) |
| (d) |
| (e) |