Global Modeling of N₂O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 10

Additional processes involving the N species (only for 𝜀_𝐶,N calculation).

No.	Process	Description
1	N + e^−→N + e^−	N elastic collisions
2	N + e^−→N (3s) + e^−	N excitation of the excited state 3s
3	N + e^−→N (3p) + e^−	N excitation of the excited state 3p
4	N + e^−→N (3d) + e^−	N excitation of the excited state 3d
5	N + e^−→N (2s ^12p ^4) + e^−	N excitation of the inner shell 2s ^12p ^4
6	N + e^−→N (2𝑝^3  ^2D) + e^−	N excitation of the ground state (2𝑝^3  ^2D)
7	N + e^−→N (2𝑝^3  ^2P) + e^−	N excitation of the ground state (2𝑝^3  ^2P)