Global Modeling of N₂O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 4

Reactions involving oxygen species considered in the N₂O plasma kinetic system.

No.	Process	Description	Rate	PoBE
Electron collisions: ionization (rates in cm^3 s^−1)
1	O2 + e^−→O2^+ + 2e^−	O2 ionization	𝑘IO2	*
2	O(^3P) + e^−→O^+ + 2e^−	O(^3P) ionization	𝑘IOP	*
3	O(^1D) + e^−→O^+ + 2e^−	O(^1D) ionization	𝑘IOD
Electron collisions: excitation and deexcitation (rates in cm^3 s^−1)
4	O(^3P) + e^−→O(^1D) + e^−	O(^1D) excitation	𝑘XOD	*
5	O(^1D) + e^−→O(^3P) + e^−	O(^1D) deexcitation	𝑘DXOD
Electronic dissociations and recombinations (rates in cm^3 s^−1)
6	O2 + e^−→2O(^3P) + e^−	O2 dissociation, diss. 1	𝑘D1OPP	*
7	O2 + e^−→O(^3P) + O(^1D)+ e^−	O2 dissociation, diss. 1bis	𝑘D1OPD	*
8	O2 + e^−→O^− + O^+ + e^−	O2 dissociation, diss. 3	𝑘D3O2
9	O2 + e^−→O(^3P) + O^+ + 2e^−	O2 dissociation, diss. 4	𝑘D4O2
10	O2 + e^−→O(^3P) + O^−	O2 dissociation, diss. 2	𝑘D2O2
11	O^− + e^−→O(^3P) + 2e^−	O^− recombination with e^−, rec. 1	𝑘R1OM
12	O2^+ + e^−→2O	O2^+ dissociative recomb.	𝑘DRO2P
Heavy particle collision: deexcitation (rates in cm^3 s^−1)
13	O2 + O(^1D)→O2 + O(^3P)	O(^1D) deexcitation with O2	𝑘O2OD
Heavy particle collision: recombination (rates in cm^3 s^−1)
14	O^− + O^+→2O(^3P)	O^− recombination with O^+, rec. 2	𝑘R2OM
15	O^− + O2^+→O(^3P) + O2	O^− recombination with O2^+, rec. 3	𝑘R3OM
16	O^− + O→O2 + e^−	O^− recombination with O, rec. 4	𝑘R4OM
Reactions on the wall (rates in s^−1)
17	O2^+  −−−→^wall  O2	O2 recombination on the wall	𝑘RWO2
18	O^+  −−−→^wall  O(^3P)	O recombination on the wall	𝑘RWO
19	O(^1D)  −−−→^wall  O(^3P)	O(^1D) deexcitation on the wall	𝑘DXWOD
20	O(^3P)  −−−→^wall  (1/2)O2	O2 formation on the wall	𝑘FWO2
21	O(^1D)  −−−→^wall  (1/2)O2	O2 formation on the wall	𝑘FWO2