Research Article
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Table 5
Reactions between nitrogen and oxygen species considered in the N2O plasma kinetic system.
| | No. | Process | Description | Rate |
| | O− recombination with N2 () (rates in cm3 s−1) | | 1 | N2 ) + O−→N2 () + O | O− recombination with N2 () | |
| | Neutralization (rates in cm3 s−1) | | 2 | + O−→N2 + O(3P) | neutralization with O− | |
| | Heavy particle collisions: deexcitation (rates in cm3 s−1) | | 3 | N2 + O(1D)→N2 + O(3P) | O(1D) deexcitation with N2 | |
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