|
| Symbol | Description | Dimensions [m] |
|
| a | Length of the coupled line | 1200 |
| b | Length of the mobile electrode | 1000 |
| c | Width of the mobile electrode | 576 |
| d | Distance between the anchor and fixed electrode | 10 |
| e | Width of the coupled line | 50 |
| f | Width of the anchor | |
| g | Gap between the coupled line and MEMS capacitors | 5 |
| h | Holes | 15 15 |
| i | Gap between MEMS capacitors | 30 |
|