Taming the Electromagnetic Boundaries via Metasurfaces: From Theory and Fabrication to Functional Devices

Figure 34

(a) SEM image of a representative antenna array fabricated on a silicon wafer. (b) Schematic experimental setup for -polarized excitation. ((c) and (d)) Measured far-field intensity profiles for the - and -polarized excitations, respectively. (e) Schematic view of a representative antenna array. (f) Scanning electron microscope images of the unit cells of four antenna arrays with different periodicities fabricated on a single silicon wafer. ((g) and (h)) The false-color maps indicate the experimentally measured relative intensity profiles for the antenna array. Figures are reproduced from [134, 138].