Inkjet-Printed Flexible MEMS Switches for Phased-Array Antennas

Table 6

An upfront summary of the performance of the printed MEMS switch.

Actuation scheme	Electrostatic
Actuation voltage	1.2 V
R (clamp-clamp beam-transmission line), connected by sacrificial layer	280~400 Ω
R (clamp-clamp beam-transmission line), after removal of sacrificial layer	2.5~3.0 MΩ
R (transmission line-transmission line), connected by sacrificial layer	380~450 Ω
R (transmission line-transmission line), after removal of sacrificial layer	0.40~0.55 MΩ
Current capacity	0.0001~0.2195 mA
Current on-off ratio	2195 : 1
RF insertion loss measured up to 13.5 GHz	5 dB